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This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.
作者簡介
Prof. Jiwang Yan is currently a professor of Mechanical Engineering at Keio University, Japan, leading the Laboratory for Precision Machining and Nano Processing (PMNP). His research areas include ultraprecision machining, micro/nanomanufacturing, material processing, and nanomechanics. He has led the implementation of tens of research projects supported by governments and industry to develop key fabrication processes for optics, molds, cutting/grinding tools, semiconductor substrates, batteries, and biomechanical components. He has received a few tens of awards from academic societies and scientific foundations for his contributions in research. He is now a member of the Japan Society of Mechanical Engineers (JSME), Japan Society for Precision Engineering (JSPE), Japan Society for Abrasive Technology (JSAT), Japan Society for Applied Physics (JSAP), American Society for Precision Engineering (ASPE), European Society for Precision Engineering and Nanotechnology (euspen), and the International Academy for Production Engineering (CIRP). He also serves on the editorial boards for several academic journals, such as the International Journal of Machine Tools and Manufacture (IJMTM).
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